5-Axis VSM17 Mechanism - Designed and Optimised for UHV

Our latest ultra-high vacuum mechanism highlights the versatility of the VSM17 stages. Constructed with five standard VSM17s, it features linear, vertical and rotation type stages. A custom bracket is used to adapt stages for the mechanism's application.

Designed and optimised for UHV
Vacuum: 1x10^-10 mBar
5-axes of movement
Utilising standard VSM17 stage

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Axis Details:

X & Y

VSM17-X-050: 50 mm travel. 5µm resolution. UHV-prepared aluminium construction. AML D35.1 UHV stepper motor. Click here to learn more about this stage.

Z

VSM17-Z-050: 50 mm vertical travel. 1 µm resolution. Stainless steel construction. AML D35.1 UHV stepper motor. Click here to learn more about this stage.

R1 & R2

VSM17-R-72K: 360° travel. 0.005° resolution. Stainless steel construction. AML D35.1 UHV stepper motor. Click here to learn more about this stage.

Controller

SMD4: single-axis bipolar stepper motor drive. Engineered to operate vacuum-compatible stepper motors with maximum performance and minimum temperature rise. Click here to learn more.

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Application:

Mechanism for off-axis parabolic (OAP) mirror alignment. 5 degrees of freedom with high resolution positioning. The OAP mirror is mounted to the table of R2 using an aluminium adapter bracket. The custom aluminium bracket was designed with the user's feedback, ensuring that the spacial requirements of the application are met. When all axes are at centre travel, the middle of the OAP mirror is centred on R1.

Each axis is controller by AML's SMD4 stepper motor drive. With AML's Device Control software, all axes can be configured within one workspace. The SMD4 is the best way to control AML UHV stepper motors with its low-power drive techniques to minimise temperature rise, and its over-temperature protection features. AML stepper motors feature K-type thermocouples which can be monitored by the SMD4. This is a key feature when controlling motors in UHV environments.

This mechanism was constructed and assembled using UHV materials and methods. These include the use of AML's UHV-compatible motors that feature vent holes and polyimide enamelled windings. All leadouts are polyimide wrapped and connectors are manufactured in UHV-compatible PEEK. NyeTorr® ultra-low outgassing grease was used on the motor bearings, leadscrews, worms and gears. This helps ensure the operational longevity of the mechanism. Assembly and testing of the mechanism was completed in our ISO Class 7 cleanroom.

If you would like to discuss you in-vacuum motion requirements, please contact us at sales@arunmicro.com.